H52152/ZF mask-plate coater

H52152/ZF mask-plate coater Specifications: 1. square glass-wafer size: 127-0.50×127-0.50×2.3±0.1mm 2. Rotate speed of main shaft: 200 6000RPM accuracy: ±10RPM increment: 1RPM 3.Acceleration speed of main shaft: 8000RPMs (only for coater) 4. Heating plate temperature: room temperature 200, accuracy: ±1 5. Glue dripping amount: 0 38ml Adjustable 6. Reliability: MTBF ≥150h MTTR≤2h 7. Technical step time: 0 999.9 sec. increment 0.1 sec 8. Overall size: L×W×H 1920mm×545mm×1120mm 9. Weight: 800kg 10. Power: 220VAC±10%,50Hz10A 11. Supply nitrogen gas condition: 0.4MPa,purity: 99.99%, OD of the nitrogen gas pipe is Φ6mm and the ID is Φ4mm. 12. Supply vacuum condition: total amount is 120dm3/min,the vacuum is -0.085MPa, outside pipe diameter: OD is Φ6mm and ID is Φ4mm. 13. Exhaust air: exhausting amount: 2.83m3/min, Min. pressure: 124Pa , the diameter of exhausting pipe is Φ100mm and it is serpentine pipe.